Fabrication technology of Al/Ta-Nb alloy impedance matching target
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摘要: 为了获得钽铌合金（Ta-Nb）材料在高压下的状态方程数据，制备了用于激光状态方程实验研究的铝/钽铌合金（Al/Ta-Nb）阻抗匹配靶。研究了Ta-Nb合金箔的精密轧制与飞秒激光切割工艺，获得了厚度13 μm，宽度400 μm的Ta-Nb合金台阶样品。使用聚乙烯醇（PVA）水溶胶将Ta-Nb合金台阶与铝（Al）标准材料进行复合装配。利用白光干涉仪、电子密度计等仪器对阻抗匹配靶的表面形貌、台阶厚度、样品密度等靶参数进行精密测量，结果表明研制的Al/Ta-Nb合金阻抗匹配靶能够满足激光状态方程物理实验需求。Abstract: To obtain the equation of state (EOS) of tantalum-niobium alloy (Ta-Nb) materials under high pressure, a type of Al/Ta-Nb impedance matching target for laser EOS experiments was fabricated. The processes of precision rolling and femtosecond laser cutting of Ta-Nb alloy foil were studied. A step sample of Ta-Nb alloy with a thickness of 13 μm and a width of 400 μm was obtained. Ta-Nb alloy step was assembled with Al standard material using polyvinyl alcohol (PVA) hydrosol. The surface morphology, step thickness and sample density of the target were measured by white light interferometer and electronic densitometer. The results show that the Al/Ta-Nb alloy impedance matching target fabricated can meet the requirements of laser EOS experiments.
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Key words:
- Ta-Nb alloy /
- impedance matching target /
- equation of state /
- precision rolling /
- femtosecond laser
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图 1 Al/Ta-Nb合金阻抗匹配靶结构示意图
Figure 1. Schematic configuration of Al/Ta-Nb alloy impedance matching target
图 2 飞秒激光烧蚀加工系统示意图和实物图
Figure 2. Experimental setup and device of femtosecond laser ablation
图 3 Al/Ta-Nb合金阻抗匹配靶显微镜图片
Figure 3. Microscopic image of Al/Ta-Nb alloy impedance match target
图 6 Al/Ta-Nb阻抗匹配靶白光干涉仪测试图像
Figure 6. White light interferometer image of Al/Ta-Nb alloy impedance matching target
表 1 Al/Ta-Nb阻抗匹配靶参数测试值与要求值的对比
Table 1. Comparison of required and measured values of Al/Ta-Nb impedance matching target
thickness of Al step/μm thickness of Ta-Nb step/μm gap width/μm Rq of Al/nm Rq of Ta-Nb/nm required value 20±1 13±2 ＜120 ＜50 ＜50 measured value 20.00 13.00 90.10 33.83 48.65 
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[1] 顾援, 傅思祖, 黄秀光, 等. 激光驱动高压下材料状态方程实验研究进展[J]. 物理, 2007, 36(6):465-471 doi: 10.3321/j.issn:0379-4148.2007.06.008Gu Yuan, Fu Sizu, Huang Xiuguang, et al. Equations of state under extremely high pressure obtained by high power laser experiments[J]. Physics, 2007, 36(6): 465-471 doi: 10.3321/j.issn:0379-4148.2007.06.008 [2] Wang Peng, Ye Qing, Duan Xiaoxi, et al. Equation of state of tungsten-doped carbon based on QEOS model for laser fusion[J]. AIP Advances, 2022, 12: 105204. doi: 10.1063/5.0113464 [3] Fu Sizu, Huang Xiuguang, Ma Minxun, et al. Analysis of measurement error in the experiment of laser equation of state with impedance-match way and the Hugoniot data of Cu up to ~2.24 TPa with high precision[J]. Journal of Applied Physics, 2007, 101: 043517. doi: 10.1063/1.2538097 [4] Rothman S D, Evans A M, Horsfield C J, et al. Impedance match equation of state experiments using indirectly laser-driven multimegabar shocks[J]. Physics of Plasmas, 2002, 9(5): 1721-1733. doi: 10.1063/1.1465419 [5] Barrios M A, Hicks D G, Boehly T R, et al. High-precision measurements of the equation of state of hydrocarbons at 1-10 Mbar using laser-driven shock waves[J]. Physics of Plasmas, 2010, 17: 056307. doi: 10.1063/1.3358144 [6] 黄秀光, 傅思祖, 舒桦, 等. 聚乙烯冲击压缩特性实验研究[J]. 物理学报, 2010, 59(9):6394-6398 doi: 10.7498/aps.59.6394Huang Xiuguang, Fu Sizu, Shu Hua, et al. Experimental study on shock compression properties of polyethylene[J]. Acta Physica Sinica, 2010, 59(9): 6394-6398 doi: 10.7498/aps.59.6394 [7] Fu Sizu, Gu Yuan, Wu Jiang, et al. Laser-driven shock stability in Al and shock compressibilities of Fe up to 0.8 TPa and SiO2 up to 0.4 TPa[J]. Physics of Plasmas, 1995, 2(9): 3461-3465. doi: 10.1063/1.871127 [8] Rothman S D, Evans A M. High accuracy EOS experiments using the AWE HELEN laser[J]. AIP Conference Proceeding, 1998, 429(1): 79-82. [9] Mirkarimi P B, Bettencourt K A, Kellam M C, et al. Thick, multistepped iron and tantalum targets for equation-of-state measurements at high pressures and low temperatures[J]. Fusion Science and Technology, 2011, 59(1): 133-138. doi: 10.13182/FST10-3682 [10] 谢军, 黄燕华, 赵利平, 等. 单点金刚石切削技术在EOS靶制备中的应用[J]. 核技术, 2011, 34(12):949-953Xie Jun, Huang Yanhua, Zhao Liping, et al. Application of SPDT technology in the field of EOS target fabrication[J]. Nuclear Techniques, 2011, 34(12): 949-953 [11] 谢军, 黄燕华, 杜凯, 等. 用金刚石车削技术制备EOS实验用铝薄膜和铜薄膜[J]. 强激光与粒子束, 2006, 18(3):427-430Xie Jun, Huang Yanhua, Du Kai, et al. Fabrication process of aluminum film and copper film used in EOS experiment by diamond turning technology[J]. High Power Laser and Particle Beams, 2006, 18(3): 427-430 [12] 李朝阳, 邢丕峰, 易泰民, 等. 状态方程靶用钼薄膜精密轧制工艺研究[J]. 原子能科学技术, 2009, 43(10):956-960 doi: 10.7538/yzk.2009.43.10.0956Li Zhaoyang, Xing Pifeng, Yi Taimin, et al. Precision rolling technique of molybdenum foil for equation of state[J]. Atomic Energy Science and Technology, 2009, 43(10): 956-960 doi: 10.7538/yzk.2009.43.10.0956 [13] 叶君建, 周斌, 何钜华, 等. 阻抗匹配靶制备及靶参数精密测量[J]. 原子能科学技术, 2008, 42(9):825-828 doi: 10.7538/yzk.2008.42.09.0825Ye Junjian, Zhou Bin, He Juhua, et al. Fabrication and measurement of impedance match target[J]. Atomic Energy Science and Technology, 2008, 42(9): 825-828 doi: 10.7538/yzk.2008.42.09.0825 [14] 路超, 任大鹏, 张德志, 等. 状态方程实验用铈微靶的聚焦离子束制备[J]. 电加工与模具, 2020(4):71-74 doi: 10.3969/j.issn.1009-279X.2020.04.014Lu Chao, Ren Dapeng, Zhang Dezhi, et al. Fabrication of high accuracy Al-Ce impedance matching target by focused ion beam[J]. Electromachining & Mould, 2020(4): 71-74 doi: 10.3969/j.issn.1009-279X.2020.04.014 [15] 谢军, 吴卫东, 杜凯, 等. Al/Cu阻抗匹配状态方程测试靶制备工艺研究[J]. 强激光与粒子束, 2005, 17(9):1356-1358Xie Jun, Wu Weidong, Du Kai, et al. Fabrication technology of Al/Cu impedance match EOS measurement target[J]. High Power Laser and Particle Beams, 2005, 17(9): 1356-1358 [16] 杨蒙生, 邢丕峰, 魏成富, 等. 铁铝阻抗匹配靶的精密扩散连接[J]. 光学 精密工程, 2016, 24(11):2738-2745 doi: 10.3788/OPE.20162411.2738Yang Mengsheng, Xing Pifeng, Wei Chengfu, et al. Precision diffusion bonding of iron-aluminum impedance match target[J]. Optics and Precision Engineering, 2016, 24(11): 2738-2745 doi: 10.3788/OPE.20162411.2738 [17] 陈果, 张玲, 黄景林, 等. 状态方程靶的纳米胶连复合技术研究[J]. 原子能科学技术, 2023, 57(4):850-856 doi: 10.7538/yzk.2022.youxian.0402Chen Guo, Zhang Ling, Huang Jinglin, et al. Study on nanoglue bonding technology of state equation experimental target[J]. Atomic Energy Science and Technology, 2023, 57(4): 850-856 doi: 10.7538/yzk.2022.youxian.0402 [18] 谢浩然, 谢金森, 吴智强, 等. 激光聚变冲击波实验用靶及制备方法[J]. 核电子学与探测技术, 2023, 43(1):195-201 doi: 10.3969/j.issn.0258-0934.2023.01.031Xie Haoran, Xie Jinsen, Wu Zhiqiang, et al. Target and preparation method for laser fusion shock wave experiment[J]. Nuclear Electronics & Detection Technology, 2023, 43(1): 195-201 doi: 10.3969/j.issn.0258-0934.2023.01.031 [19] 胡忠武, 李中奎, 张小明. 钽及钽合金的工业应用和进展[J]. 稀有金属快报, 2004, 23(7):8-10Hu Zhongwu, Li Zhongkui, Zhang Xiaoming. New developments and applications of tantalum and tantalum alloys[J]. Materials China, 2004, 23(7): 8-10 [20] 孟凡成, 欧阳南. 钽铌新材料与高科技发展[J]. 江西冶金, 2003, 23(6):29-32 doi: 10.3969/j.issn.1006-2777.2003.06.007Meng Fancheng, Ouyang Nan. Ta/Nb new materials and the development of high technology[J]. Jiangxi Metallurgy, 2003, 23(6): 29-32 doi: 10.3969/j.issn.1006-2777.2003.06.007 [21] 华劲松, 谷岩, 张世文, 等. 钽铌合金材料的冲击压缩特性研究[J]. 高压物理学报, 2007, 21(1):83-88 doi: 10.3969/j.issn.1000-5773.2007.01.014Hua Jinsong, Gu Yan, Zhang Shiwen, et al. Dynamic behavior of Ta-Nb alloy under shock compression[J]. Chinese Journal of High Pressure Physics, 2007, 21(1): 83-88 doi: 10.3969/j.issn.1000-5773.2007.01.014 [22] 黄秀光, 罗平庆, 傅思祖, 等. 激光驱动冲击波在铝-金阻抗匹配靶中的传播稳定性[J]. 强激光与粒子束, 2007, 19(11):1832-1836Huang Xiuguang, Luo Pingqing, Fu Sizu, et al. Shockwave propagation stability in Al-Au impedance-matching target irradiated by high power laser[J]. High Power Laser and Particle Beams, 2007, 19(11): 1832-1836 [23] 舒桦, 傅思祖, 黄秀光, 等. 神光Ⅱ装置上速度干涉仪的研制及应用[J]. 物理学报, 2012, 61:114102 doi: 10.7498/aps.61.114102Shu Hua, Fu Sizu, Huang Xiuguang, et al. Line-imaging optical recording velocity interferometer at “Shenguang-II” laser facility and its applications[J]. Acta Physica Sinica, 2012, 61: 114102 doi: 10.7498/aps.61.114102 [24] 张国霞, 展宏勋, 舒滢, 等. 钽箔材轧制过程中张力模型的建立[J]. 热加工工艺, 2018, 47(17):133-136,140Zhang Guoxia, Zhan Hongxun, Shu Ying, et al. Establishment of tension model in tantalum foil rolling process[J]. Hot Working Technology, 2018, 47(17): 133-136,140 [25] 叶君建, 谢志勇, 黄秀光, 等. 皮秒激光在激光状态方程靶制备中的应用[J]. 强激光与粒子束, 2014, 26:022009 doi: 10.3788/HPLPB20142602.22009Ye Junjian, Xie Zhiyong, Huang Xiuguang, et al. Application of picosecond laser processing to target fabrication in equation of state experiments[J]. High Power Laser and Particle Beams, 2014, 26: 022009 doi: 10.3788/HPLPB20142602.22009 [26] 叶君建, 何钜华, 傅思祖, 等. 等熵稀疏靶的制备及靶参数精密测量[J]. 原子能科学技术, 2008, 42(S1):358-361Ye Junjian, He Juhua, Fu Sizu, et al. Fabrication and measurement of isentropic release target[J]. Atomic Energy Science and Technology, 2008, 42(S1): 358-361 -
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