Abstract: To meet the different requirements of different fields for parameters such as amplitude, pulse width, waveform, and repetition rate, a distributed all-solid-state waveform adjustable high-voltage pulse generator has been developed based on the distributed concept. This pulse generator comprises multiple sub-modules with identical structures. Each module is based on the all-solid-state Marx with the half-bridge structure, while the drive uses a magnetic isolation scheme. Moreover, every module has a uniformly designed connection terminal and communication protocol. Multiple modules can operate independently or directly in series to achieve superior performance. The entire device features a layered design and compact structure. This paper elaborates on the pulse generator's circuit topology, working principle, and waveform generation method. Finally, three 9-level test prototypes with 8-level basic units have been constructed, which can produce a 25-level unipolar arbitrary high-voltage waveform in series. The output peak voltage can reach 16 kV.