Abstract: In the process of high energy and high power extreme ultraviolet (EUV) irradiation, carbon deposition and surface oxidation are easy to form on the surface of the EUV mirror, which will affect its reflectivity and shorten its service life. To solve this problem, technology of nitride and oxide capping coating on the surface of extreme ultraviolet multilayer film was studied experimentally and characterized. In the preparation process, based on DC reactive magnetron sputtering coating technology, the “hyperbola” relationship between process gas flow and sputtering voltage was studied, to optimize the control of the amount of reactive gas, and then reduce the influence of reactive gas on Mo/Si multilayer films during reactive sputtering. Based on this method, TiN, ZrN and TiO₂ capping layer were plated on the surface of Mo/Si multilayer films and were characterized by grazing incident X-ray reflection (GIXR), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). It is proved that the nitride capping layer has certain performance advantages.