靶电流对核辐射探测器用铝薄膜组织及性能的影响

Effect of target current on microstructure and properties of Al film for nuclear radiation detector

  • 摘要: 采用磁控溅射技术控制不同的铝靶电流在 聚对苯二甲酸乙二醇酯 (PET)的表面制备双面铝薄膜。利用扫描电子显微镜(SEM)和原子力显微镜(AFM)观察铝薄膜的微观形貌,使用X射线衍射仪(XRD)对铝薄膜进行物相分析,利用划格法检测铝薄膜和PET的结合情况,利用紫外-可见分光光度计检测铝薄膜的挡光性,采用手持式核辐射探测器检测α和β粒子射线粒子在铝薄膜中的透过率。结果表明:铝薄膜表面光滑平整,具有金属光泽,Al晶粒均匀致密。铝薄膜无孔洞、裂纹等缺陷;随着Al靶电流增加,Al晶粒尺寸、铝薄膜厚度及沉积速率均增大,铝薄膜粗糙度先降低后增大。铝薄膜的挡光性先提高后降低,α、β粒子的平均透过率均逐渐降低;当铝靶电流为2.0 A时,铝薄膜的粗糙度最小,为2.49 nm,光透过率最低在0.025%左右,α、β粒子的平均透过率最高,分别为581.7 CPS、547.2 CPS。

     

    Abstract: In this study, double-sided Al film was prepared on the surface of polyethylene terephthalate (PET) by controlling different Al target currents with magnetron sputtering technology. The micro-morphology of the Al film was observed using scanning electron microscope (SEM) and atomic force microscope (AFM). Phase analysis of the Al film was carried out using X-ray diffraction (XRD). The adhesion between the Al film and PET was detected by the cross-cut method. The light-blocking property of the Al film was measured by an ultraviolet-visible spectrophotometer. The transmittance of α and β particles in the Al film was detected using a handheld nuclear radiation detector. The results show that the surface of the Al film is smooth and flat with a metallic luster, and the Al grains are uniform and dense. The Al film has no defects such as pores and cracks. As the Al target current increases, the Al grain size, the thickness of the Al film, and the deposition rate all increase, and the roughness of the Al film first decreases and then increases. The light-blocking property of the Al film first improves and then decreases, and the average transmittance of both α and β particles gradually decreases. When the Al target current is 2.0 A, the roughness of the Al film is the minimum, which is 2.49 nm. The light transmittance is the lowest, around 0.025%. The average transmittance of α and β particles is the highest, being 581.7 CPS and 547.2 CPS respectively.

     

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