Abstract: To reduce the threshold of using pulse power source, a compact pulse power source based on Marx generator is designed and implemented. The Marx generator is a 7-stage unipolar charging coaxial structure with low inductance ceramic capacitor and ultraviolet preionization output narrow pulse. It uses adjustable primary high voltage power supply and 2-way synchronous trigger switch, and metal shell as grounding shield and discharge circuit; it is filled with high pressure N₂. Using the power source based on the above design, when the charging voltage is 26 kV and the charging voltage is 0.3 MPa, the high voltage pulse of 33 ns rise time, 59 ns pulse width and 109.2 kV amplitude is obtained on the 60 Ω load. The power source is housed in an aluminum alloy cylinder with a diameter of 0.2 m and a length of 1.1m. This paper provides a design idea and a reference prototype for compact and modular pulse power source, which can be used as flash X-ray radiography drive source.