Abstract: Yunguang II accelerator adopts induction voltage adder technique route. The whole system consists of 12 Marx generators, 24 water lines, 12 induction cavities and a long magnetically insulated transmission line. Because of its large scale, many series and complex structure, the alignment measurement technique is required to ensure the whole assembly precision, especially the coaxiality of the induction cavity and the magnetically insulated transmission line. Aiming at the technical defects of complex and complicated measuring system of similar equipment in foreign countries, an all-system alignment measuring scheme using laser tracker as the core means is put forward. The alignment and adjustment of the generator output flange, induction cavity guide rail, magnetically insulation transmission line and its guide rail are completed respectively, especially a measuring mechanism of target base which can realize double-direction inner hole centering is designed. With high precision and efficiency, the alignment measurement and adjustment of 12-stage induction cavity in series is realized, which lays a good technical foundation for the construction of larger-scale facilities.