基于光腔衰荡大口径取样光学元件性能测试与缺陷分析

Performance characterization and defect analysis of large-aperture sampling optics based on cavity ring-down method

  • 摘要: 针对前表面高反、后表面增透的取样光学元件的性能测试需求,基于光腔衰荡大口径光学元件反射率均匀性测试实验装置,分别从反射膜面入射和增透膜面入射,扫描测量得到该取样光学元件的反射率分布及光学损耗、缺陷高分辨扫描成像;并进一步通过对比分析缺陷分布图,实现取样光学元件反射膜、透射膜以及基片缺陷分类;另外通过建立双通道光腔衰荡实验装置,获取增透膜的剩余反射率分布以及透射膜缺陷类型;实现了大口径取样光学元件光谱和缺陷特性的准确测量。

     

    Abstract: In high-energy laser systems, the performance parameters of large-aperture sampling optics determine the accuracy of beam testing and evaluation, as well as the precision of overall system performance control. This paper focuses on the performance testing requirements of sampling optics with high-reflectivity (HR) on the front surface and anti-reflectivity (AR) on the back surface. Utilizing the cavity-ring-down (CRD)-based reflectivity uniformity testing of large-aperture sampling optics, the reflectivity distribution, optical loss, and high-resolution scanning imaging of defects of sampling optics are obtained by scanning measuring the incident light from both the reflective film surface and the anti-reflective film surface, respectively. Furthermore, by comparing and analyzing the defect distribution maps, the classification of defects in the reflective film, transmissive film, and substrate of the sampling optics is achieved. Finally, by establishing a dual channel CRD system, the residual reflectance distribution of anti-reflective film and the types of defects in the transmissive film were obtained. The testing and analysis method proposed in this paper provides a systematic and comprehensive characterization tool for the performance evaluation and defect analysis of sampling optics.

     

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