大连先进光源高精度电子枪标定和安装

High-precision fiducialization and installation for electron gun in Dalian Advanced Light Source

  • 摘要: 直流高压电子枪是大连先进光源的核心设备,用于获得高品质电子束源,其中阴阳极的准直精度直接决定了电子束流品质。根据物理精度指标,对各个步骤进行误差分配,使用关节臂和激光跟踪仪开展标定和安装工作。在标定过程中,提出了一种稳健圆柱拟合方法,能够剔除扫描数据中的粗差并求出圆柱的参数,重复精度优于软件拟合的结果。在安装阶段建立阳极控制网,调整真空腔和阴极位置,使其控制在误差范围内,并使用经纬仪验证同轴度满足精度要求。系统总结电子枪的安装流程,控制各个步骤的误差累积,保证电子枪能够产生符合物理要求的束流。

     

    Abstract:
    Background : The DC high-voltage electron gun used in the Dalian Advanced Light Source generates electron beams with high repetition frequency, with key structural components including the cathode and anode. Physicists have imposed a stringent requirement of less than 0.1 mm for the coaxiality of these two components.
    Purpose Based on the error specifications, we allocated the accuracy for calibration and installation and conducted related research.
    Methods : During the calibration process, we used an articulated arm to scan data from the cathode and anode. Since the software data processing method did not meet the design requirements, we proposed a robust cylinder fitting method to determine the axial direction of the cylinder, reducing the impact of gross errors. During the installation process, we established a control network using a laser tracker to ensure that the deviation between the actual and theoretical positions of the targets met the design requirements, and this was verified.
    Results : The proposed cylinder fitting method effectively eliminated the influence of gross errors, achieving a calibration error of less than 0.04 mm. During installation, error accumulation was strictly controlled, with a cumulative error of less than 0.08 mm, resulting in the high-precision completion of the entire electron gun installation project. The electron gun successfully generated an electron beam that met the physical requirements, demonstrating the effectiveness of error control during the installation process.
    Conclusions : Our approach effectively controlled the magnitude of errors at each step, providing a quantifiable measurement solution for the ultra-precision assembly of other devices.

     

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