基于光触发多门极半导体开关的重频全固态Marx脉冲功率源

Rep-rate all-solid-state Marx pulse power source with laser initiated multi-gate semiconductor switch

  • 摘要: 高重复频率固态脉冲功率源是当前脉冲功率技术发展的重要方向之一,高功率固态开关是高重频固态脉冲功率源的关键器件。本文研制了一种新型的重频全固态脉冲功率源,采用Marx电路拓扑结构,开关采用光触发多门极半导体开关(LIMS)。LIMS激光触发,具有极短闭合时间和极小时间抖动(小于1 ns),易于实现串联应用。采用两只LIMS开关串联研制出工作电压13 kV的LIMS开关组件,工作电流达10 kA,单个LIMS开关组件光触发能量2 mJ。固态Marx脉冲功率源为8级串联,每级电容约为100 nF,采用脉冲变压器升压后对每级电容进行充电。当充电电压13 kV时,在88欧姆负载上获得100 kV高压脉冲,上升时间约为8 ns,单脉冲能量达62.5 J。控制脉冲充电电源及触发激光的时序和工作频率,该重频全固态脉冲功率源可以在100 Hz、100 kV下稳定工作。

     

    Abstract:
    Background Repetitive all-solid-state pulsed power generators are essential for applications such as high-energy physics, accelerators, and industrial processing, yet conventional Marx generators often rely on gas spark gaps or magnetic switches, which suffer from high jitter, limited lifetime, and poor repetition rates. Fast semiconductor switches, while improving solid-state operation, face challenges in achieving nanosecond rise times and synchronous series-stacking at high voltages.
    Purpose This study therefore aims to develop a high-voltage, high-repetition-rate all-solid-state Marx generator that overcomes these limitations by employing a laser-triggered multi-gate semiconductor switch (LIMS) as the primary switching element, achieving ultra-low jitter, fast rise time, and stable repetitive operation at 100 kV and 100 Hz.
    Methods A LIMS is used for its sub-nanosecond jitter and fast turn-on capability, and two LIMS switches are connected in series to form a 13 kV, 10 kA module requiring only 2 mJ trigger energy per module. The Marx generator consists of eight series stages, each with a 100-nF capacitor charged by a pulse transformer in boost mode, and the timing and repetition frequency of both the pulse charging power supply and the laser trigger are precisely regulated. Testing was conducted with an 88 Ω resistive load.
    Results At a stage charging voltage of 13 kV, the Marx generator produces a 100 kV high-voltage pulse across the 88 Ω load, featuring an 8 ns rise time and a single-pulse energy of 62.5 J. By precisely controlling the trigger timing and repetition frequency, the system achieves stable operation at 100 Hz and 100 kV.
    Conclusions In conclusion, the proposed LIMS-based all-solid-state Marx generator successfully delivers repetitive 100 kV pulses with nanosecond rise time, low jitter, and high stability at 100 Hz, providing a promising solid-state alternative to traditional gas-switched or magnetics-based pulsers suitable for demanding high-power, high-repetition-rate applications.

     

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