高压射频同轴穿墙件的设计与研究

Design and research of high-voltage RF coaxial feedthrough

  • 摘要: 高压射频同轴穿墙件是粒子加速器、高能物理实验等领域中实现真空与大气环境间功率传输的核心部件,其性能直接决定系统的稳定性与可靠性。提出了一种50 Ω阻抗匹配的基于陶瓷-金属封接的高压射频同轴穿墙件设计方案。首先根据穿墙件的技术指标,完成内导体、外导体和绝缘介质的选材及密封结构的一体化设计,采用氧化铝陶瓷与聚四氟乙烯(PTFE)绝缘介质材料,通过渐变式台阶过渡结构保证信号阻抗连续,并根据同轴传输线理论完成相关参数的量化计算。采用三维机械设计软件Solidworks进行结构设计,结合电磁仿真软件CST Microwave Studio完成高频特性仿真分析。仿真结果表明:穿墙件在3 GHz段内驻波比≤1.15、插入损耗≤0.02 dB,特性阻抗稳定在47.5~50.5 Ω。完成了样件的研制,实测结果表明:真空漏率<1×10−13 Pa∙m3/s;3 GHz频段内驻波比≤1.5,插入损耗≤0.65 dB。此设计为高压射频穿墙件的结构优化与性能提升提供了理论支撑和工程设计参考。

     

    Abstract:
    Background High-voltage RF coaxial vacuum feedthrough serves as an indispensable core part realizing power transmission across vacuum and atmospheric environments for particle accelerators and high-power physics experiments, whose working performance directly determines the operational stability and reliability of the whole experimental system.
    Purpose To realize 50 Ω characteristic impedance matching and meet strict vacuum sealing plus high-voltage working requirements, this work proposes a feedthrough design based on ceramic-to-metal sealing technology, so as to supply theoretical basis and practical engineering references for structural improvement of relevant high-voltage RF feedthroughs.
    Methods Guided by coaxial transmission line theory, alumina ceramic and PTFE are selected as insulating dielectrics; graded step-transition configuration is adopted to guarantee continuous impedance. Mechanical structure is modeled via SolidWorks, and CST Microwave Studio is employed for high-frequency electromagnetic simulation; a physical prototype is processed and assembled for vacuum and radio frequency performance measurement.
    Results In 1–3 GHz band, simulated indicators: VSWR<1.2, insertion loss<0.02 dB, characteristic impedance stably ranging from 47.5 Ω to 50.5 Ω. Prototype test results: vacuum leakage rate below 1×10−13 Pa·m3/s, VSWR<1.5 and insertion loss<0.65 dB across full 3 GHz frequency range.
    Conclusions The designed feedthrough gains outstanding vacuum tightness and favorable high-frequency transmission property, and the presented material selection and structural design strategy can guide the performance optimization of similar high-voltage vacuum RF feedthrough components.

     

/

返回文章
返回