基于物理版图寄生参数提取的GaN HEMT小信号快速建模方法

A fast small-signal modeling approach for GaN HEMTs based on physical layout parasitic parameter extraction

  • 摘要: 针对固态高功率微波系统中氮化镓高电子迁移率晶体管(GaN HEMT)的建模需求,提出一种基于物理版图的小信号等效电路模型快速开发方法。通过分析器件的结构特征,构建了包含28个元件的小信号等效电路拓扑结构。基于器件的具体物理版图信息,结合电磁仿真结果,提出了外部寄生电容的直接提取方法,有效提升了参数提取的效率和准确性。基于Advanced Design System(ADS)仿真平台,建立了完整的小信号模型参数提取流程,实现了小信号模型参数的快速提取与高效验证。以0.35 μm GaN工艺为研究对象,针对4×375 μm GaN HEMT器件,开发了相应的小信号等效电路模型,并完成了外部寄生参数和本征参数的提取。在偏置条件为 \bfI_\bfdsq =75 mA@ \bfV_\bfds =60 V时,小信号模型在0.5~12 GHz频率范围内的S参数仿真结果与实测数据一致性较好,误差为0.531%。该实验结果验证了所提出的小信号等效电路模型快速开发方法的有效性与实用性。

     

    Abstract:
    Background Accurately modeling gallium nitride high electron mobility transistors (GaN HEMTs) is essential for advancing solid-state high-power microwave systems. However, conventional parameter extraction methods often suffer from low efficiency and insufficient accuracy due to the complex physical layout of GaN devices. From an engineering application perspective, small-signal model parameter extraction must adhere to three core principles: accuracy, efficiency, and rapid verifiability.
    Purpose This paper aims to present a rapid development method for small-signal equivalent-circuit models based on the physical layout of GaN devices, addressing the challenges in efficient and accurate parameter extraction.
    Methods A small-signal equivalent-circuit topology containing 28 elements was constructed by analyzing the structural characteristics of the GaN device. Leveraging specific physical layout information and electromagnetic simulation results, a direct extraction method for extrinsic parasitic capacitances was introduced. Furthermore, a complete parameter extraction flow for the small-signal model was established using the Advanced Design System (ADS) simulation platform to enable fast parameter acquisition and efficient validation.
    Results For a 4×375 μm GaN HEMT fabricated with a 0.35 μm GaN process, a corresponding small-signal equivalent-circuit model was developed, with both extrinsic parasitic and intrinsic parameters successfully extracted. Under the bias condition of \mathrmI_\textdsq =75 mA@ \mathrmV_\textds =60 V, the simulated S-parameters of the small-signal model showed good agreement with measured data across the 1~12 GHz frequency range, achieving an error of only 0.531%.
    Conclusions Experimental results verify the effectiveness and practicality of the proposed method. The established extraction flow significantly improves modeling efficiency and accuracy, providing a reliable solution for the design and optimization of GaN HEMT-based high-power microwave circuits.

     

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