掺钒半绝缘4H-SiC光导开关皮秒响应特性研究

Investigation of the picosecond response in vanadium-doped semi-insulating 4H-SiC photoconductive switches

  • 摘要: 为满足高频高功率脉冲发生系统对窄脉宽、快速响应开关的需求,采用掺钒半绝缘4H-SiC衬底制作了非完全对称结构的平面型光导开关,在不同激光能量照射和不同偏置电压施加条件下开展了不同间隙宽度光导开关器件的皮秒光电响应特性测试。当偏置电压和激光能量分别为2 kV和1.2 mJ时,间隙为0.7 mm光导开关器件最高电压转换效率约为81.6%,上升时间为229 ps;当偏置电压和激光能量分别为10 kV和1.2 mJ时,光导开关器件最高输出电压为8.16 kV,上升时间为241 ps。

     

    Abstract:
    Background Photoconductive semiconductor switches are key optically triggered devices for high-frequency and high-power pulsed systems, in which kilovolt-level output, high voltage conversion efficiency, and sub-nanosecond response must be achieved simultaneously. Vanadium-doped semi-insulating 4H-SiC is particularly attractive for such switches because of its wide bandgap, high critical electric field, and suitability for fast high-voltage switching. However, the picosecond response of planar SiC photoconductive switches is strongly affected by the electrode geometry, optical excitation energy, and applied bias voltage.
    Purpose Here we report a planar photoconductive semiconductor switch fabricated on a vanadium-doped semi-insulating 4H-SiC substrate with a partially asymmetric electrode configuration, and evaluate its picosecond photoelectric response under different gap-width, laser-energy, and bias-voltage conditions.
    Methods Planar 4H-SiC photoconductive switch devices with different electrode gaps were fabricated and characterized. Their transient output voltage, voltage conversion efficiency, and rise time were measured under varied laser energies and bias voltages to assess the dependence of switching performance on device structure and operating conditions.
    Results For the device with a 0.7 mm electrode gap, a maximum voltage conversion efficiency of approximately 81.6% was obtained at a bias voltage of 2 kV and a laser energy of 1.2 mJ, with a rise time of 229 ps. When the bias voltage was increased to 10 kV at the same laser energy, the device generated a maximum output voltage of 8.16 kV while maintaining a rise time of 241 ps.
    Conclusions These results demonstrate that the vanadium-doped semi-insulating 4H-SiC planar photoconductive switch can provide efficient kilovolt-level pulse conversion with a picosecond-scale response. The proposed device structure offers a promising solid-state switching approach for compact, fast-response, high-power pulsed generation systems.

     

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