米量级大口径强激光光学元器件研制进展

Progress in the Development of Meter-Scale Large-Aperture High-Power Laser Optical Components

  • 摘要: 激光惯性约束聚变驱动装置向更高能量、更大口径和更高重复频率发展,对光学元件提出了亚纳米级面形精度、米级均匀性、高通量抗损伤和批量一致性等综合要求。本文综述了中国科学院上海光学精密机械研究所面向激光聚变驱动器需求,在大口径光学元件全技术链路上的研究进展。围绕精密加工、高性能薄膜、脉冲压缩光栅、大功率脉冲氙灯和高精度检测五个方向,归纳了数据驱动环抛与子孔径抛光的中频误差抑制、宽带偏振与低应力反射膜的制备、反射式静态全口径曝光、金属封接氙灯的可靠性提升,以及原位绝对标定和波前拼接测量等关键技术。现有结果表明,上述技术已在相应样件、元件或检测平台上获得验证,并为米量级元件的制造与性能评价提供了技术基础。进一步讨论了大口径元件在全频段误差控制、薄膜缺陷与应力协同抑制、超大口径制造一致性及计量溯源等方面面临的挑战,为新一代高功率激光装置关键光学元件的技术选择与工程化发展提供参考。

     

    Abstract: Background: The development of laser inertial confinement fusion (ICF) driver facilities toward higher energy, larger aperture, and higher repetition rates has imposed increasingly stringent requirements on optical components, including sub-nanometer surface figure accuracy, meter-scale uniformity, high laser-induced damage resistance, and batch-to-batch consistency. The fabrication and evaluation of large-aperture optical components have become critical challenges for the advancement of next-generation high-power laser systems. Purpose: This review aims to summarize the recent research progress of the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, in addressing the requirements of laser fusion drivers, with a focus on the entire technological chain of large-aperture optical components. Methods: The key technologies developed in five major areas are systematically reviewed: precision manufacturing, high-performance optical coatings, pulse compression gratings, high-power pulsed xenon flashlamps, and high-precision metrology. The review covers data-driven deterministic polishing and sub-aperture polishing techniques for suppressing mid-spatial-frequency errors, fabrication technologies for broadband polarization and low-stress reflective coatings, reflective static full-aperture exposure methods for large-aperture gratings, reliability enhancement of metal-sealed xenon flashlamps, and advanced measurement techniques including in-situ absolute calibration and wavefront stitching interferometry. Results: The reviewed technologies have been validated through corresponding samples, optical components, and experimental platforms. These achievements provide essential technical support for the manufacturing and performance evaluation of meter-scale optical components used in high-power laser facilities. Conclusions: Future challenges are discussed, including full-spectrum error control, coordinated suppression of coating defects and stress, manufacturing consistency of ultra-large-aperture components, and traceable precision metrology. These developments provide valuable guidance for the technological selection and engineering implementation of critical optical components in future high-power laser fusion systems.

     

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