Repetition rate pulsed power technology and its applications:(ⅵ) Typical applications
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摘要: 综合介绍了高重复频率脉冲功率在材料、环保、生物医疗、光源和高能加速器领域的代表性应用。采用脉冲功率的离子注入和表面改性已经被用于工业产品。废气和废液处理的研究成果正在向实用化接近。使用脉冲电场的杀菌和癌症治疗正在吸引很多学者和厂家,因此脉冲功率在生物医学领域的应用前景是非常乐观的。另外,决定未来集成电路工艺标准的极紫外光源已逐步走向生产线。高能加速器上的闸流管会渐渐被功率半导体器件取代。Abstract: This review article summarizes the applications of repetitive pulsed power in many fields, such as material development, environment protection, bio- and medical-science, light sources, and high-energy accelerators. The plasma immersion ion implantation and pulsed electron-beam surface treatment have been used in industrial production. Flue-gas and wastewater treatment by pulsed atmospheric discharge are being developed toward practical application. Sterilization and cancer-cell treatment using pulsed electric field have attracted great attention from academic and industrial communities. Plasma generated extreme ultraviolet(EUV) radiation is hopefully going to be used in photo-lithography for mass production in the near future. The thyratrons used on high-energy accelerators will eventually be replaced by power semiconductor devices.
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Key words:
- pulsed power /
- high voltage /
- short pulse /
- high-power pulsed switch /
- power electronics /
- gas discharge
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