侧面预电离氟化氪激光器研制

A 1/4 JKrF LASER WITH SIDE-PREIONIZATION

摘要: 采用侧面紫外火花隙自动预电离代替小极上小孔预电离,使放电泵浦氟化氪激光器的主放电均匀性大为改善。输出激光能量由140mJ提高到250mJ,增益区光能密度为2.3J/1,同时电极寿命和气体寿命也大为提高。

Abstract: A discharge-pumped KrF laser is constructed.Preionization holes in the electrode surface are replaced by two raws of pins on the side of the electrode for ultraviolet autopreionlzation, resulting in a considerable improvement of main discharge uniformity and an increase of energy depletion. Laser output ranges from l40mJ to 25OmJ with the energy efficiency of 0.8%, and specific energy of 2.3J/1.In addition,the lifetime of the gas and electrodes is also increased.