波长1315nm的石英窗口增透膜
The making of antireflection films based on quartz
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摘要: 用Ta2O5/SiO2膜系镀制了石英窗口增透膜。并在优化膜系,改进膜厚控制后,使得1315nm波长单面剩余反射率降到0.05%。Abstract: After optimizing the design of the thin films and improving the control methods of film thickness , we have coated the anti-reflection film based on the quartz by Ta2O5/SiO2,and get the good result:R1315<0.05%.
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