X光多层膜反射镜的损伤与破坏实验研究

  • 摘要: 产生X光激光的等离子体环境对X光多层膜反射镜造成损伤与破坏。通过模拟实验,给出国产Mo/Si多层膜反射镜的破坏阈值大约是0.10J/cm2,在这个辐照剂量下,多层膜表面均方粗糙度明显增加,反射率几乎降至为零。提出了防止多层膜反射镜破坏的一些想法。

     

    Abstract: The plasma environment which creates Xray laser brings the difficulty to the application of Xray multilayer reflector .The most difficult is that the Xray emitted by the plasma destroys and damages the multilayer reflector. It is shown by the simulated test that the damage d threshold of Mo/Si multilayer reflector made in china is less than 0.10J/cm 2. With the exposure the radiation dose the roodmean square roughness of multilayer apparently increases and the reflectivity almost drops to zero. Accor ding to these results,the article state some ideas for preventing damages of the multilayer reflector.

     

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