Abstract: The design of attenuation foils for the waveband of Ni like r are earth Xray Laser is described. According to the results of the design, the selfsupport silver and polystyrene(C8H8) attenuation foils are made by magnetron spu ttering and spincoating respectively.The mass thickness of the foils and their thickness homogeneity are measured by an α energy spectrum mass thickness apparatus and an αstep100 thickness measurement a pparatus respectively. The surface impurities of silver attenuation foil are analyzed using Auger Elect ron Spectroscope．