用于ICF驱动器的分频光栅两种工艺误差分析

Analysis on two technologic errors of color separation grating used for ICF

摘要: 对用于ICF驱动器分频光栅的刻槽深度进行了优化，使其具有更优的分频效果。在此基础上，对制作工艺带来的占空比误差和塌边结构进行了分析，给出了分频光栅具有良好分频效果时工艺上所能允许的误差范围。

Abstract: In this paper, the depth of color separation grating applied in ICF system is optimized firstly for good separating effect. After this, duty cycle error and the trapezoid structure are analyzed. A probable scope of technologic error that make the color separation grating have good effect is given in the end.