Abstract: The damage reason of an anode tungstenmesh is analyzed by scanning electron mirror and experiments. When a tungstenmesh is quenchtreated, an oxidizedlayer forms on its surface and the life of the tungstenmesh increases obviously. Auger effect spectrum of tungstenmesh samples shows that the thickness of the oxidizedlayer changes with quenchtreated temperature. The experimental results show that the thickness of the oxidizedlayer obviously affects the life of tungstenmesh. The optimum thickness of the oxidizedlayer is about 400nm when a 90ns(FWHM), 6kA, 1MeV beam passes through the tungstenmesh.