Abstract: 电子束; 离子辅助; 离子束溅射; 薄膜特性 The optical thin films, including single thin films of ZrO2, TiO2, Al2O3 and AR coatings, were respectively prepared by Ebeam, ion assisted deposition and ion beam sputtering. Then these thin films' properties were measured by several methods, such as profilemeter, atomic force microscopy, surface thermal lensing and Xray diffraction. The thin films' refractive index, surface roughness, absorption and microstructure were given and discussed. Finally, the conclusion was drawn: the option of proper technique to fabricate optical thin films is ion assisted deposition.