单发实验测量软X射线多层膜反射镜反射特性

Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance

摘要: 提出了一种单发实验测量软X射线波段多层膜反射镜反射特性的简易方法。实验采用激光等离子体软X射线源作为光源，用平焦场光栅谱仪分光，在光路中引入掠入射镜以消除高级次谱的影响，用软X光CCD记录，在一发激光打靶实验中，测量了设计中心波长为13.9 nm的Mo/Si多层膜反射镜的反射特性。

Abstract: A new method of single-shot measurement of normal incidence soft x-ray Mo/Si multilayer mirror’s reflectance is proposed, experiment has been performed using laser-produced plasma x-ray source, flat field grating spectrometer, soft x-ray CCD. Grazing incident mirror was employed to eliminate high-order contribution. Reflectance of Mo/Si multi-layer mirror with a 13.9 nm designed center wavelength is measured in one laser shot.