Abstract: Metal films with material theoretical density are important to measurement of equation of state under high pressure. In this paper, an aluminum film and a copper film used in EOS(equation of state) experiment are produced by diamond turning technology. Process parameters of finish machining are given, including the feed rate 0.001 mm/r, the spindle rotate speed 3 000 r/min, and the depth of cutting 1 μm. Then the surface roughness is characterized by a Form Talysurf series 2 device. The results indicate that the thickness of both aluminum film and copper film are less than 10 μm, the surface root mean square roughness less than 5 nm, the primary maximum peak to valley height less than 50 nm and the thickness uniformity more than 99%.