Abstract: Fe nanoparticles were prepared by flow- levitation method for physical doping of ICF target materials. The morphologies, granularities and structures of Fe particles were investigated by TEM, XRD techniques. The results show that the particles prepared by this means are spherical and the particle size can be controlled availably in 30～70 nm. In addition, it is discovered by XRD techniques that there appeared Fe3O4 oxide film generated in the air, adhering to the surface of the nanoparticles.