α-C:H膜表面形貌及光学性能的测试分析

刘兴华; 吴卫东; 何智兵; 袁前飞; 王红斌; 蔡从中

α-C:H膜表面形貌及光学性能的测试分析

Roughness and optical properties of α-C:H films

摘要

摘要: 以H2和反式-2-丁烯（T2B）为工作气体，利用低压等离子体增强化学气相沉积法制备了α-C:H薄膜。采用原子力显微镜、扫描电镜测试了α-C:H薄膜的表面形貌，分析了实验参数对其形貌的影响。研究表明：固定压强(15 Pa)，当T2B/H2流量比为4时，薄膜均方根粗糙度可达0.97 nm。保持T2B/H2流量比固定，增加工作气压，薄膜均方根粗糙度减小，表面更平整、致密。利用傅里叶变换红外光谱仪对薄膜价键结构进行分析，结果表明：α-C:H薄膜中主要存在sp3C—H键，氢含量较高；T2B/H2流量比越低，薄膜中含有更多的C=C键。应用UV-VIS光谱仪，获得了波长在200～1 100 nm范围内薄膜的光吸收特性，α-C:H薄膜透过率可达98%，计算得到的折射率在1.16～1.40。随工作气压的增加，α-C:H薄膜中sp3杂化键增多，透过率、折射率增大。

Abstract: α-C:H thin films were deposited by low-pressure plasma enhanced chemical vapor deposition(LPPCVD) with H2 and Trans-2-butene as source gases. Atomic force microscope and scanning electron microscope images demonstrated the surface morphology of the films deposited under different T2B/H2 flow ratios and pressure. It was found that the root-mean-square roughness was 0.97 nm when the T2B/H2 flow ratio and pressure were 4 and 15 Pa respectively. The FTIR spectrum showed that the structure and composition of the films change with the T2B/H2 flow ratios, and this films mainly contain sp3C—H bonds, which have low T2B/H2 flow ratio and possess more C=C bonds. The UV-VIS spectrum showed that the transmission ratios can reach 98% in the visible light range, the films have strong absorption in the

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