小型铌酸锂多功能集成光学器件
Mini LiNbO3 multifunction integrated optical device
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摘要: 为满足小型光纤陀螺对光学器件小体积的要求，对铌酸锂多功能集成光学小型化器件的结构做了分析和优化设计。采用BPM软件分析了Y形分支波导的S形波导损耗与弯曲长度及折射率差的关系。通过调整退火质子交换的工艺参数，增加了波导对光的束缚能力；降低了小型化芯片上S形波导的弯曲损耗；去掉了原有Y形波导的输出端直波导，直接由S形弯曲波导引至输出端，在更短的芯片上得到了更长的弯曲过渡区。设计制作的芯片长度由常规的20 mm减至12.5 mm，封装后的器件长度减小到20 mm，为目前同类常规器件尺寸的2/3。设计制作的器件插入损耗典型值小于2.5 dB，全温损耗变化量小于0.2 dB。Abstract: In order to meet the demand of mini fiber optical gyro for pint-sized devices, the structure of a mini LiNbO3 multi-function integrated optical device (MIOD) is analyzed and optimized. The loss induced by the curvature of S-bend waveguide and the refractive index difference between waveguide and substrate are simulated by beam propagation method software. The bend loss of Sbend waveguide is decreased by adjusting the parameters of annealed proton exchange. Compared with conventional design, longer bend transition section occupying smaller area is realized by replacing the straight output waveguide with S-bend waveguide directly. The chip length is decreased from 20.0 to 12.5 mm, and the package length is 20.0 mm, which is 2/3 of conventional devices. The typical insertion loss of the min
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Key words:
- integrated optics /
- waveguide /
- fiber optical gyro /
- linbo3 /
- modulator
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