Abstract: A kinetic model for electron-beam pumping XeCl excimer laser consists of an e-beam deposition calculation, electron temperature and electron-reaction rate calculation, and chemical/laser kinetics codes, which can precisely predict time-dependent behavior of optical gain and absorption.
This mode is based on the "kinetic model for long-pulse XeCl laser performance" by Dr. Levin2, the "Theoretical simulation of electron-beam-excited Xenon-Chloride (XeCl) lasers "by Dr. Kannai1, and the "Radiative and kinetic mechanisms in Bound-Free Excimer Lasers "by Dr. Werner3. A set of equations are solved numerically using the fourth-degree Runge-Kutta methode on VAX-11/780 computer.
The temporal evolution of the various species involved, gain, absorption and laser output intensity along with excitation rate and electron energy during lasing for XeCl excimer lasers are computed. The results have shown that the intrinsic efficiency is a function of excitation rate, current density and ratio of Ne/Xe/HCl mixture.