Abstract: The function of rotation in Y and Z-coordinates direction is added to the auxiliary target supports as well as the X-direction motor-driven rotation of targets group in the little target chamber. By this way, the relative position parameters between the target groups can be adjusted properly on the spot. At the same time, a novel set of focus alignment checking system is developed,which can examine the angle between the two focus lines in the Y-Z plane in an accuracy of O.2mrad and set the transverse distance (X₂₃) in lOμm precision. How the X₂₃ value affected the experimental results are also observed.