Abstract: Based on characteristics of image-relaying structure in high power excimer MOPA laser system, simulation and analysis software of targeting beam’s barycenter stability was designed by using LABVIEW and MATLAB. Simulation was made to measured results of every optical component in laboratory environment. Simulation and validation of budget values for optical components was and optimization of error budget of system was accomplished via post-allocation for several times. It is shown that targeting beam’s barycenter stability in the condition of current laboratory environment can’t satisfy needs and index of high demand optical components can be allotted to 1.7 μrad when index of low demand optical components have some stability margin. These results can provide a guide to construction of