Abstract: This paper presents the numerical simulation method by Finite Integration Method softwareMAFIA and Finite Element Method softwareANSYS to calculate Eigenvalue and Q value in two kinds of high frequency cavity. The simulation result are good consistency with part experiment data; The average calculation precise may be less than 5%. It proves that both electromagnetic software are capable of simulating eigenvalue problems in high frequency cavity, making some research for compute simulation to satisfy practical engineering design demand in computation precise. The calculation time is compared for the both software.