离子辅助沉积氧化物薄膜的光学特性

OPTICAL PROPERTIES OF OXIDE COATINGS PREPARED BY ION ASSISTED DEPOSITION

摘要: 考察了不同离子、离子能量、离子束流密度等制备参数对离子辅助沉积的TiO₂、ZrO₂和SiO₂薄膜的折射率、吸收和激光损伤阈值等光学特性的影响。

Abstract: Effects of ion energy, ion current intensity and ion species on refractive indices, optical absorptance and laser- induced damage thresholds of TiO₂, ZrO₂, SiO₂ coatings deposited using ion assisted deposition were investigated.