Development of distributed all-solid-state waveform adjustable high-voltage pulse generator
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摘要: 为了满足多领域对幅值、脉宽、波形、重复频率等参数的不同要求，基于分布式理念，提出了一种分布式全固态波形可调高压脉冲发生器研制发生器。该脉冲发生器由多个结构相同的子模块构成，单个模块采用半桥结构的全固态Marx主拓扑，驱动采用磁隔离方案；每个模块具有统一设计的连接端子与通信协议，多个模块可以独立工作，也可以直接串联工作以获得更好的性能。整个装置采用分层式设计，结构紧凑。详细阐述了该发生器的电路拓扑、工作原理与波形产生方法，并搭建了三台8级基本单元的9电平试验样机，串联后可输出25级电平的单极性任意高压脉冲波形，最大输出电压达到16 kV。Abstract: To meet the different requirements of different fields for parameters such as amplitude, pulse width, waveform, and repetition rate, a distributed all-solid-state waveform adjustable high-voltage pulse generator has been developed based on the distributed concept. This pulse generator comprises multiple sub-modules with identical structures. Each module is based on the all-solid-state Marx with the half-bridge structure, while the drive uses a magnetic isolation scheme. Moreover, every module has a uniformly designed connection terminal and communication protocol. Multiple modules can operate independently or directly in series to achieve superior performance. The entire device features a layered design and compact structure. The paper elaborates on the circuit topology, working principle, and waveform generation method. Finally, three 9-level test prototypes with 8-level basic unit have been constructed, which can produce a 25-level unipolar arbitrary high-voltage waveform in series. The output peak voltage can reach 16 kV.
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图 6 不同模块各自部分的阶梯波
Figure 6. Ladder waves of different modules in their respective sections
表 1 主要仿真参数
Table 1. Main simulation parameters
C0/nF load/pF Udc/V tw/μs m/pcs n/levels N/levels 100 50 700 80 3 8 24 
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