靶电流对核辐射探测器用铝薄膜组织及性能的影响

李明旭; 李欣; 郭巧琴; 齐源昊; 雷雨

doi:10.11884/HPLPB202537.240241

靶电流对核辐射探测器用铝薄膜组织及性能的影响

doi: 10.11884/HPLPB202537.240241

李明旭^1,,
李欣²,
郭巧琴^2, ,,
齐源昊²,
雷雨¹

1.
西安中核核仪器股份有限公司，西安 710061
2.
西安工业大学材料与化工学院，西安 710032

基金项目: 陕西省高校发动机关键部件材料研发与应用青年创新团队(K20220185)；陕西省重点研发项目(2022GY-404)；未央区秦创原科技成果转化项目(202414)；西安市科技计划项目(23GXFW0036)

详细信息

作者简介:
李明旭，xhlmxu@163.com

通讯作者:
郭巧琴，guoqiaoqin66@126.com。

中图分类号: TB79
计量
- 文章访问数: 63
- HTML全文浏览量: 48
- PDF下载量: 2
- 被引次数: 0
出版历程
- 收稿日期: 2024-07-23
- 修回日期: 2025-02-24
- 录用日期: 2025-02-24
- 网络出版日期: 2025-03-15
- 刊出日期: 2025-03-31

Effect of target current on microstructure and properties of Al film for nuclear radiation detector

Li Mingxu^1
,,
Li Xin²,
Guo Qiaoqin^{2
, ,},
Qi Yuanhao²,
Lei Yu¹

1.
CNNC Xi’an Nuclear Instrument Co., Ltd., Xi’an 710061, China
2.
School of Materials Science and Chemical Engineering, Xi’an Technological University, Xi’an 710032, China

摘要

摘要: 采用磁控溅射技术控制不同的铝靶电流在聚对苯二甲酸乙二醇酯（PET）的表面制备双面铝薄膜。利用扫描电子显微镜（SEM）和原子力显微镜（AFM）观察铝薄膜的微观形貌，使用X射线衍射仪（XRD）对铝薄膜进行物相分析，利用划格法检测铝薄膜和PET的结合情况，利用紫外-可见分光光度计检测铝薄膜的挡光性，采用手持式核辐射探测器检测α和β粒子射线粒子在铝薄膜中的透过率。结果表明：铝薄膜表面光滑平整，具有金属光泽，Al晶粒均匀致密。铝薄膜无孔洞、裂纹等缺陷；随着Al靶电流增加，Al晶粒尺寸、铝薄膜厚度及沉积速率均增大，铝薄膜粗糙度先降低后增大。铝薄膜的挡光性先提高后降低，α、β粒子的平均透过率均逐渐降低；当铝靶电流为2.0 A时，铝薄膜的粗糙度最小，为2.49 nm，光透过率最低在0.025%左右，α、β粒子的平均透过率最高，分别为581.7 CPS、547.2 CPS。
- 靶电流 /
- 柔性基体 /
- 铝薄膜 /
- 挡光性 /
- 粒子透过率
Abstract: In this study, double-sided Al film was prepared on the surface of polyethylene terephthalate (PET) by controlling different Al target currents with magnetron sputtering technology. The micro-morphology of the Al film was observed using scanning electron microscope (SEM) and atomic force microscope (AFM). Phase analysis of the Al film was carried out using X-ray diffraction (XRD). The adhesion between the Al film and PET was detected by the cross-cut method. The light-blocking property of the Al film was measured by an ultraviolet-visible spectrophotometer. The transmittance of α and β particles in the Al film was detected using a handheld nuclear radiation detector. The results show that the surface of the Al film is smooth and flat with a metallic luster, and the Al grains are uniform and dense. The Al film has no defects such as pores and cracks. As the Al target current increases, the Al grain size, the thickness of the Al film, and the deposition rate all increase, and the roughness of the Al film first decreases and then increases. The light-blocking property of the Al film first improves and then decreases, and the average transmittance of both α and β particles gradually decreases. When the Al target current is 2.0 A, the roughness of the Al film is the minimum, which is 2.49 nm. The light transmittance is the lowest, around 0.025%. The average transmittance of α and β particles is the highest, being 581.7 CPS and 547.2 CPS respectively.
- target current /
- flexible matrix /
- Al film /
- light blocking /
- particle transmittance

HTML全文

图 1 不同铝靶电流下铝薄膜微观形貌

Figure 1. Microscopic morphology of Al film at different Al target currents

下载: 全尺寸图片幻灯片

图 2 不同铝靶电流下铝薄膜截面形貌

Figure 2. Cross-sectional morphology of Al film at different Al target currents

下载: 全尺寸图片幻灯片

图 3 不同铝靶电流下铝薄膜三维形貌

Figure 3. 3D morphology of the Al film at different Al target currents

下载: 全尺寸图片幻灯片

图 4 不同铝靶电流下铝薄膜粗糙度柱状图

Figure 4. Histogram of Al film roughness at different Al target currents

下载: 全尺寸图片幻灯片

图 5 不同铝靶电流下铝薄膜XRD图谱

Figure 5. XRD of Al film under different Al target currents

下载: 全尺寸图片幻灯片

图 6 铝靶电流与沉积速率的关系

Figure 6. Relationship between Al target current and deposition rate

下载: 全尺寸图片幻灯片

图 7 不同铝靶电流下铝薄膜划格试验后的宏观形貌

Figure 7. Macroscopic morphology of Al film after scribing test at different Al target currents

下载: 全尺寸图片幻灯片

图 8 PET和不同铝靶电流铝薄膜在紫外光区和可见光区的透过率

Figure 8. Transmittance of PET and Al film with different Al target currents in the UV and visible regions

下载: 全尺寸图片幻灯片

图 9 不同靶电流铝薄膜α、β粒子透过率对比图

Figure 9. Comparison of α and β particle transmittance of Al film with different target currents

下载: 全尺寸图片幻灯片

表 1 划格试验评级标准

Table 1. Grid test rating standards

grade	explanation	grid-marked surface morphology
0	The cutting edges are completely smooth, with no squares detached.	/
1	Slight coating detachment occurs at the intersection of cuts, but the affected cross-cut area is not significantly greater than 5%.
2	Coating detachment occurs at the intersections of cuts and/or along the edges of cuts, with the affected cross-cut area significantly greater than 5% but not significantly greater than 15%.
3	The coating partially or completely detaches in large fragments along the cutting edges and/or partially or completely peels off in different areas of the grid. The affected cross-cut area is significantly greater than 15% but not significantly greater than 35%.
4	The coating detaches in large fragments along the cutting edges and/or partially or completely peels off in different areas of the grid. The affected cross-cut area is significantly greater than 35% but not significantly greater than 65%.
5	The extent of peeling exceeds that of Level 4.	/

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