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高温烧结Cr2O3涂层对Al2O3陶瓷真空沿面耐压性能的影响

杨洁 陈欣 李晨 张晓宁 何佳龙 刘平 秦臻 赵伟 黄刚 向军 李天涛 李杰 董攀 王韬

杨洁, 陈欣, 李晨, 等. 高温烧结Cr2O3涂层对Al2O3陶瓷真空沿面耐压性能的影响[J]. 强激光与粒子束, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275
引用本文: 杨洁, 陈欣, 李晨, 等. 高温烧结Cr2O3涂层对Al2O3陶瓷真空沿面耐压性能的影响[J]. 强激光与粒子束, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275
Yang Jie, Chen Xin, Li Chen, et al. Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic[J]. High Power Laser and Particle Beams, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275
Citation: Yang Jie, Chen Xin, Li Chen, et al. Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic[J]. High Power Laser and Particle Beams, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275

高温烧结Cr2O3涂层对Al2O3陶瓷真空沿面耐压性能的影响

doi: 10.11884/HPLPB202537.240275
基金项目: 国家自然科学基金青年科学基金项目(12005209、12205280)
详细信息
    通讯作者:

    杨 洁,yangjie_sc@126.com

    李 晨,lic05@tsinghua.org.cn

  • 中图分类号: TM281

Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic

  • 摘要: 利用浸涂法将Cr2O3涂覆于Al2O3陶瓷表面,通过高温烧结获得涂层陶瓷,并系统性地研究了Cr2O3涂层对样品的物质成分、微观形貌、二次电子发射系数、表面电阻率和真空沿面耐压性能的影响。结果表明:涂层陶瓷表面呈红黑色,其为Al2O3-Cr2O3固溶体、MgAl2O4和Cr2O3三种物质的混合物。相较于Al2O3陶瓷,涂层表面晶粒和孔洞的尺寸均较小,其晶粒尺寸均匀性也有明显提升。高温烧结后,Al、Cr两种元素相互扩散,并且涂层中有少量从陶瓷基体迁移而来的玻璃相。高温烧结的Cr2O3涂层将Al2O3陶瓷的二次电子发射系数减小至3.22,将表面电阻率减小至4.52×1011 Ω,将真空沿面耐压强度增大至34.44 kV/cm,此值较Al2O3陶瓷提高了约108%。
  • 图  1  陶瓷样品真空沿面耐压性能测试方法示意图

    Figure  1.  Schematic diagram of testing method for vacuum surface hold-off voltage of ceramic samples

    图  2  陶瓷样品照片

    Figure  2.  Image of ceramic samples

    图  3  陶瓷样品的XRD图谱

    Figure  3.  X-ray diffraction pattern of ceramic samples

    图  4  陶瓷样品的SEM图

    Figure  4.  SEM micrographs of ceramic samples

    图  5  陶瓷样品的二次电子发射系数变化图

    Figure  5.  Variation diagram of secondary electron emission yield for ceramic samples

    图  6  陶瓷样品的表面电阻率对比图

    Figure  6.  Contrast diagram of surface resistivity for ceramic samples

    图  7  陶瓷样品在脉冲电压下的耐压强度对比图

    Figure  7.  Contrast diagram of hold-off electric field strength for ceramic samples under pulsed voltage

    表  1  陶瓷样品的表面成分

    Table  1.   Surface ingredient of ceramic samples

    sample mass fraction/%
    O Na Mg Al Si K Ca Cr
    Al2O3 ceramic 40.8 0.5 0.54 56.06 0.67 0.53 0.89 /
    Cr2O3 coated Al2O3 ceramic 33.54 / 0.19 18.73 0.52 / 0.03 46.99
    下载: 导出CSV
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出版历程
  • 收稿日期:  2024-08-26
  • 修回日期:  2025-03-07
  • 录用日期:  2025-03-07
  • 网络出版日期:  2025-03-17
  • 刊出日期:  2025-04-15

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