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面向精密实验的飞秒激光精密加工技术研究进展

何煦 马云灿 马骁 曹柱荣 喻寅 银颖 李晶 杨靖 孟立民 李军 陶天炯 杨昊 蒋均

何煦, 马云灿, 马骁, 等. 面向精密实验的飞秒激光精密加工技术研究进展[J]. 强激光与粒子束, 2025, 37: 011004. doi: 10.11884/HPLPB202537.240304
引用本文: 何煦, 马云灿, 马骁, 等. 面向精密实验的飞秒激光精密加工技术研究进展[J]. 强激光与粒子束, 2025, 37: 011004. doi: 10.11884/HPLPB202537.240304
He Xu, Ma Yuncan, Ma Xiao, et al. Research progress of femtosecond laser precision machining technology for precision experiment[J]. High Power Laser and Particle Beams, 2025, 37: 011004. doi: 10.11884/HPLPB202537.240304
Citation: He Xu, Ma Yuncan, Ma Xiao, et al. Research progress of femtosecond laser precision machining technology for precision experiment[J]. High Power Laser and Particle Beams, 2025, 37: 011004. doi: 10.11884/HPLPB202537.240304

面向精密实验的飞秒激光精密加工技术研究进展

doi: 10.11884/HPLPB202537.240304
基金项目: 中国工程物理研究院发展项目(TCGH0323、TCGH0610、TCGH0105);冲击波物理与爆轰物理全国重点实验室基金项目(2021JCJQLB05707、2022JCJQLB05707);中国工程物理研究院流体物理研究所横向项目(20-163-02-ZT-004-005-01)
详细信息
    作者简介:

    何 煦,hexu0320@163.com

    通讯作者:

    马云灿,mayuncan@caep.cn

  • 中图分类号: TN206

Research progress of femtosecond laser precision machining technology for precision experiment

  • 摘要: 飞秒激光精密加工技术具备极短脉冲宽度避免或缓解热效应、极高峰值功率密度适用于任意固体材料、极小焦斑尺寸实现微区精准去除或改性等三个方面的特性,满足精密诊断/测量实验涉及的各类难加工及特种材料的安全精密加工需求。高稳定性高重复频率飞秒激光器的应用,弥补了低重复频率飞秒激光难以实现高速扫描的不足,这为精密实验所需各类精密样品/样件的高效精密加工提供了重要能量源。以中国工程物理研究院各研究所精密实验对精密样品的安全高效精密加工需求为切入点,分别以激光X射线精密靶材及结构、炸药材料微结构、超硬材料复合折射透镜结构、微型探头光纤精密固定结构、太赫兹滤波器核心结构等典型应用场景为例,介绍了高重频飞秒激光精密加工技术在难加工材料和特种材料安全高效精密加工方面的研究进展。
  • 图  1  飞秒激光加工技术与常见加工技术的定性比较

    Figure  1.  Qualitative comparison between femtosecond laser processing technology and common processing technology

    图  2  高重频飞秒激光加工技术平台示意图及控制软件[17]

    Figure  2.  Schematic diagram and control software of high repetition rate femtosecond laser processing technology platform[17]

    图  3  高重频飞秒激光加工各种金属箔片材料及结构的典型结果

    Figure  3.  Typical metal foils and structures processed by high repetition rate femtosecond laser

    图  4  炸药材料“孔洞”动态演化精密诊断实验示意图及炸药晶体样品

    Figure  4.  Schematic diagram and explosive crystal sample of precision diagnosis experiment for dynamic evolution of explosive material "hole"

    图  5  高重频飞秒激光加工超硬材料复合折射透镜的几何结构示意图、扫描路径、实物图、扫描电镜图[22,41]

    Figure  5.  Geometric structure diagram, scanning path, image and SEM images of superhard composite refractive lens processed by high repetition rate femtosecond laser[22,41]

    图  6  高重频飞秒激光加工的金属钽凹槽支架的应用场景、结构及化学选择性腐蚀效果

    Figure  6.  Application scenario, structure and chemical selective etching effect of tantalum groove bracket processed by high repetition rate femtosecond laser

    图  7  高重频飞秒激光加工的太赫兹滤波器的几何结构设计图和核心结构及其滤波性能测试结果[45]

    Figure  7.  Geometric design and core structure of terahertz filter processed by high repetition rate femtosecond laser and test results of filtering performance[45]

    表  1  抛物柱孔型碳化硅和金刚石复合折射透镜的几何结构参数

    Table  1.   Geometric structural parameters of parabolic column hole SiC CRL and diamond CRL

    opening diameter
    D/μm
    vertex interval
    d/μm
    length of lens
    unit l/μm
    radius of curvature
    at vertex R/μm
    number of lens
    units N
    refractive index phase
    factor δ@E=12 keV
    focal length
    f/m
    diamond CRL 500 50 900 73.5 9 5.07×10−6 0.807
    SiC CRL 500 50 900 73.5 9 4.66×10−6 0.876
    下载: 导出CSV
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  • 收稿日期:  2024-09-04
  • 修回日期:  2024-12-12
  • 录用日期:  2024-12-12
  • 网络出版日期:  2024-12-20
  • 刊出日期:  2025-12-13

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