Design of microwave plasma reactor based on compressed electric field
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摘要: 微波等离子体因其高电子密度和功率利用效率等优势，在材料合成和化工催化等领域都展现出显著优势。为解决传统反应器反应区小，限制其大规模应用的问题，基于压缩波导原理创新性地提出了一种三棱柱式微波等离子体反应器结构。设计采用三端口对称构型，并在腔体内部引入压缩波导结构，以实现电场的有效叠加和增强；运用多物理场耦合计算方法，系统分析了端口位置和微波相位对腔体内部反射系数和电场分布特性的影响规律。结果显示，优化端口位置可以降低反射系数，提高能量利用利效率；调控端口相位能有效增强电场的叠加效应，使电场集中且广泛分布在石英管区域，峰值场强高达1.64×105 V/m，满足大面积等离子体的激发条件，为后续微波等离子体化学反应的研究奠定了基础。Abstract: Microwave plasma has shown significant advantages in the fields of materials synthesis and chemical catalysis due to its high electron density and power utilization efficiency. To solve the problem that the small reaction area of traditional reactor limits its large-scale application, a three-prism microwave plasma reactor structure is innovatively proposed based on the principle of compressed waveguide. The design adopts a three-port symmetric configuration and introduces a compressed waveguide structure inside the cavity to achieve effective superposition and enhancement of the electric field. In addition, the influence of the port positions and microwave phases on the reflection coefficient and electric field distribution characteristics inside the cavity is systematically analyzed by using the multi-physical field coupling calculation method. The results show that optimizing the port position can reduce the reflection coefficient and improve the efficiency of energy utilization, regulating the port phase can effectively enhance the superposition effect of the electric field, so that the electric field is concentrated and widely distributed in the area of the quartz tube, and the peak field strength is as high as 1.64×105 V/m, which can satisfy the excitation conditions of the large-area plasma, and lays a foundation for the subsequent research of microwave plasma chemical reaction.
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Key words:
- plasma /
- microwave /
- rectangular waveguide /
- reactor /
- phases
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图 2 不同压缩段长度的端口反射系数
Figure 2. Port reflection coefficients for different compression section lengths
图 6 端口不同位置对应的反射系数
Figure 6. The reflection coefficient corresponding to the different positions of the port
图 7 不同Y0下的石英管电场分布
Figure 7. Electric field distribution of quartz tube at different Y0
图 8 端口3在不同相位下的石英管电场强度
Figure 8. The electric field strength of the quartz tube at different phases of port 3
表 2 网格独立性
Table 2. Grid independent validation of the geometry model
No. element size element number mesh element quality minimum average Ⅰ coarse 35 136 0.192 3 0.651 0 Ⅱ normal 37 386 0.215 2 0.659 0 Ⅲ fine 46 568 0.253 2 0.661 4 Ⅳ finer 57 345 0.204 3 0.665 3 Ⅴ extra fine 84 252 0.203 0 0.666 2 Ⅵ extremely fine 154 392 0.183 3 0.672 3 
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