一种新型高压电子束焊机偏压电源设计

李波; 赵娟; 李洪涛; 康传会; 李松杰; 马勋

doi:10.11884/HPLPB202638.250155

一种新型高压电子束焊机偏压电源设计

doi: 10.11884/HPLPB202638.250155

中国工程物理研究院流体物理研究所，四川绵阳 621900

基金项目: 国家自然科学基金面上项目（12475306）

详细信息

作者简介:
李　波，120546232@qq.com

通讯作者:
马　勋，13778053819@163.com。

中图分类号: TM836
计量
- 文章访问数: 13
- HTML全文浏览量: 10
- PDF下载量: 0
- 被引次数: 0
出版历程
- 收稿日期: 2025-05-28
- 修回日期: 2025-11-07
- 录用日期: 2025-10-28
- 网络出版日期: 2025-11-20

Design of a New Bias Power Supply for High Voltage Electron Beam Welding Machine

Institute of Fluid Physics, CAEP, Mianyang 621900, China

摘要

摘要: 偏压电源是高压电子束焊机电源系统的重要部件之一，根据电子束焊机电源系统的技术要求，研制了一套输出直流电压−100 V～−2 kV可调，全电压范围内纹波小于等于0.1%，电压稳定性优于0.1%，输出电流大于3 mA的偏压电源，分别给出了该电源在电阻负载和高压电子枪负载下的实验结果。设计上采用吸收、保护等方法，解决了电子枪负载打火损坏偏压电源问题，成功将偏压电源串接在高压电源回路中，通过回采偏压电源回路中工作电流的大小来改变偏压电源输出电压（偏压杯电压），偏压杯电压根据束流大小而自适应调节，实现了工作束流实时快速跟随和精细调控。成功应用于−150 kV/33 mA高压电子束焊机，使高压电子束焊机的束流纹波达到±0.19%，束流稳定性优于±5 μA、束流可重现性达到±0.04%，满足了总体指标要求。
- 偏压电源 /
- 电压自适应调节 /
- 束流稳定性 /
- 束流重复性
Abstract: Background
Currently, the bias power supplies in high-voltage electron beam welders, both domestically and internationally, are suspended at a negative high voltage. The output voltage regulation is achieved by sampling the operating current in the high-voltage power circuit. The sampled current signal undergoes multi-stage conversion before being sent to the bias power supply, which then adjusts its output voltage based on the feedback current. This adjusted output voltage, in turn, alters the current in the high-voltage circuit. Since the bias power supply is an inverter-based power source, its response and adjustment cycles are relatively long, and precise step-wise regulation is challenging. Consequently, this leads to significant beam current ripple, poor stability, and inadequate beam current reproducibility, failing to meet the requirements of precision welding for beam current stability and low fluctuation.
Purpose
This paper aims to develop a bias power supply with an adjustable DC output voltage ranging from −100 V to −2 kV, featuring low voltage ripple and high voltage stability. The bias power supply can be connected in series within the high-voltage circuit, enabling rapid adjustment and precise control of the operating beam current through a fast closed-loop feedback control system. Additionally, the bias power supply must operate reliably during load arcing of the electron gun.
Methods
The design incorporates absorption and protection methods to address the issue of electron gun load arcing damaging the bias power supply. By connecting the bias power supply in series within the high-voltage circuit and feeding back the operating current in the bias power supply loop, the output voltage (bias cup voltage) is adjusted. The bias cup voltage adaptively regulates according to the beam current magnitude, achieving real-time rapid tracking and fine control of the operating beam current.
Results
A bias power supply was developed with an adjustable DC output voltage from −100 V to −2 kV, featuring a ripple voltage of ≤0.1% across the entire voltage range, voltage stability better than 0.1%, and an output current greater than 3 mA. When applied to a −150 kV/33 mA high-voltage electron beam welder, it achieved a beam current ripple of ±0.19%, beam current stability better than ±5 μA, and beam current reproducibility of ±0.04%.
Conclusions
Based on the methods of absorption, protection, and adaptive regulation of the bias cup voltage according to the beam current magnitude, a novel bias power supply for high-voltage electron beam welders has been successfully developed. This solution addresses the issues of large beam current ripple, poor stability, and inadequate reproducibility in high-voltage electron beam welding, providing an effective approach for high-stability, precision-controllable welding.
- bias power supply /
- adaptive voltage regulation /
- beam stability /
- beam repeatability

HTML全文

图 1 系统总体结构图

Figure 1. Overall structure of the system

下载: 全尺寸图片幻灯片

图 2 偏压电源主电路原理图

Figure 2. Schematic diagram of main circuit of bias power supply

下载: 全尺寸图片幻灯片

图 3 高压电子束焊机电源电路拓扑

Figure 3. Power circuit topology of high-voltage electron beam welding machine

下载: 全尺寸图片幻灯片

图 4 隔离供电电路原理框图

Figure 4. Principle block diagram of isolated power supply circuit

下载: 全尺寸图片幻灯片

图 5 直流电压及纹波波形

Figure 5. DC Voltage and ripple voltage waveform

下载: 全尺寸图片幻灯片

图 6 电子枪束流波形

Figure 6. Beam waveform of electron gun

下载: 全尺寸图片幻灯片

表 1 高压电子束焊机指标

Table 1. Parameters of high voltage electron beam welding machine

No. manufacturer beam fluctuation beam stability

1 SST 1% 0.5%

2 pro-beam 1% 0.5%

3 guilin Shida 2% ±0.5%

4 institute of fluid physics, CAEP ±0.19% 0.015%

下载: 导出CSV

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