激光聚变X射线诊断用高精度多层膜器件与系统技术

苏子净; 黄秋实; 伊圣振; 张哲; 盛鹏峰; 余俊; 张兴; 董佳钦; 齐润泽; 张众; 王占山

doi:10.11884/HPLPB202638.260019

激光聚变X射线诊断用高精度多层膜器件与系统技术

doi: 10.11884/HPLPB202638.260019

苏子净^1,,
黄秋实^1, ,,
伊圣振¹,
张哲¹,
盛鹏峰¹,
余俊¹,
张兴²,
董佳钦³,
齐润泽¹,
张众¹,
王占山^1, ,

1.
同济大学物理科学与工程学院，精密光学工程技术研究所，先进微结构材料教育部重点实验室，上海市数字光学前沿科学研究基地，上海市全光谱高性能光学薄膜器件与应用专业技术服务平台，上海 200092
2.
中国工程物理研究院激光聚变研究中心，四川绵阳 621900
3.
中国工程物理研究院上海激光等离子体研究所，上海 201800

基金项目: 国家自然科学基金项目(12235011、12305365)

详细信息

作者简介:
苏子净，suzj@tongji.edu.cn

通讯作者:
黄秋实，huangqs@tongji.edu.cn

王占山，wangzs@tongji.edu.cn。

中图分类号: O434.1
计量
- 文章访问数: 22
- HTML全文浏览量: 9
- PDF下载量: 3
- 被引次数: 0
出版历程
- 收稿日期: 2026-01-14
- 修回日期: 2026-04-01
- 录用日期: 2026-03-20
- 网络出版日期: 2026-04-20

High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion

1.
Shanghai Full-Spectrum High-Performance Optical Thin Film Devices and Application Professional Technical Service Platform, Shanghai Frontiers Science Center of Digital Optics, Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2.
Laser Fusion Research Center, CAEP, Mianyang 621900, China
3.
Shanghai Institute of Laser Plasma, CAEP, Shanghai 201800, China

摘要

摘要: 高精度多层膜器件是开展多维度、高分辨激光惯性约束聚变（ICF）X射线诊断的核心元件。针对激光聚变热斑高质量观测需求，开展了X射线多层膜诊断成像器件的研究，包括Kirkpatrick-Baez（KB）反射镜、离轴非球面反射镜和Wolter型显微元件。提出了基于多通道KB反射镜的高分辨自发光与背发光诊断数据同步测量方法，经测试系统空间分辨率优于5 μm。发展了高精度拼接检测和离子束加工一体化的非球面反射镜制造工艺，经过离子束修正后50 mm反射镜面型残差达1.56 nm（RMS），粗糙度优于0.3 nm。建立了Wolter型显微元件设计、检测、抛光和多层膜镀制的全流程制作方法。上述器件与系统技术的研究为我国ICF实验等离子体诊断提供了有力的支撑。
- X射线诊断 /
- 多层膜器件 /
- KB反射镜 /
- 非球面反射镜 /
- Wolter元件
Abstract: Backgrounds
Multilayer film optics allow for the accurate characterization of high-energy-density plasmas produced in ICF implosions by capturing critical information—temporal, spatial, and spectral—of X-rays, thereby enabling dynamic monitoring of the target. Such comprehensive diagnostics are essential for validating numerical models and understanding the key physics that ultimately determine implosion performance.
Purpose
To address critical X-ray diagnostic applications in ICF research, this paper presents the design, fabrication, characterization, and implementation of high-performance multilayer film optics and systems capable of achieving imaging resolution better than 5 μm, including three critical components: Kirkpatrick-Baez (KB) mirrors, off-axis aspheric mirrors, and Wolter microscopes.
Methods
Key advancements were achieved in X-ray optics, ranging from multi-channel KB mirrors for dual-mode diagnostics, precision-manufactured off-axis aspheres, and comprehensively engineered Wolter microscopes.
Results
Key achievements include a spatial resolution of sub-5 μm using the multi-channel KB mirror system, an exceptional surface figure of 1.56 nm RMS and roughness <0.3 nm on a 50 mm length off-axis asphere via ion beam figuring, and the successful implementation of a full-process methodology for Wolter microscopes.
Conclusions
Breakthroughs in the high-precision manufacturing of multilayer film optics and systems will provide robust technical support for plasma diagnostics in domestic ICF experiments.
- X-ray diagnostic /
- multilayer film optics /
- KB mirror /
- aspheric mirror /
- Wolter micro-optics

HTML全文

图 1 (a)背光和自发光同步成像的多能谱KB显微镜(b)子午方向和弧矢方向光路结构

Figure 1. (a) Schematic of multi-spectral KB microscope for simultaneous backlighting and self-emission imaging (b) Optical layout of KB microscope in the meridional and sagittal directions

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图 2 多能谱KB显微镜高能和低能通道的光谱响应曲线

Figure 2. Spectral response curves of the high-energy and low-energy channels of the multi-spectral KB microscope

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图 3 实验室内利用铜靶X射线管得到的系统离线标定结果

Figure 3. Off-line calibration results of the system obtained with a Cu-target X-ray tube in the laboratory

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图 4 激光装置对内爆靶丸的背光和自发光流线成像及结果分析

Figure 4. Imaging and analysis of backlighting and self-emission for imploding capsules on a laser facility

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图 5 椭圆面反射成像

Figure 5. Ellipsoidal surface reflection imaging

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图 6 子孔径拼接测量原理

Figure 6. Principle of sub-aperture stitching measurement

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图 7 面型残差和斜率误差

Figure 7. Surface residual error and slope error

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图 8 AFM测量粗糙度

Figure 8. Surface roughness measured by AFM

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图 9 Wolter-I显微镜成像光路

Figure 9. Wolter-I microscope imaging optical path

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图 10 模拟计算获得Wolter镜片的物方分辨率

Figure 10. Object-side resolution of the Wolter mirror obtained by simulation

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图 11 芯轴表面轴向面形测量结果

Figure 11. Measurement result of mandrel surface axial profile

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图 12 制作完成的X射线Wolter镜筒样件

Figure 12. Completed X-ray Wolter mirror shell prototype

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表 1 KB显微镜光学结构参数

Table 1. Optical parameters of the KB microscope

mirror radius of curvature/m θ/（°） u/mm v/mm magnification length/mm

M1/M2 20 0.8462 160.0 1920.0 12.000 10

M3 20 0.8495 170.0 1910.0 11.235 10

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表 2 椭圆柱面反射镜参数

Table 2. Elliptical cylinder mirror parameters

semi-major axis/mm semi-minor axis /mm center radius of curvature/m

775 12.55 32.08

下载: 导出CSV

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