Fabrication and performance of Al/Cu hybrid mandrel for NIF ignition hohlraum
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摘要: 选取纯度较高的1100铝棒作为加工模芯的原材料,利用金刚石车床精加工出表面粗糙度均方根值小于20 nm的铝模芯,采用磁控溅射的方法在铝模芯上制备厚度大于5 m的铜防护层,得到铝铜复合芯轴。对制备的铜防护层的表面微观结构、结晶性能、厚度一致性进行了分析测试,结果表明磁控溅射法制备的铜防护层沿(111)面择优生长,表面粗糙度均方根值小于30 nm,厚度一致性优于95%,圆柱度小于1 m。镀层与基底结合力强,可满足大厚度黑腔涂层的制备需求。Abstract: By comparing the chemical component and machined performance of two kinds of 1100 Al rod, the higher purity one is chosen for Al mandrel. Al mandrel is prepared by diamond turning machine with a surface roughness less than 20 nm (RMS) and Al/Cu hybrid mandrel is explored by depositing a 5 m thick copper layer on Al mandrel via magnetron sputtering deposition. The surface roughness, thickness uniformity and crystallinity of Cu film are analyzed by white light interferometer, XRD. The results show that the prepared Cu film with surface roughness less than 30 nm (RMS), thickness uniformity more than 95%, and cylindricity less than 1 m appears (111) preferential orientation growth. The interfacial bonding strength between Cu film and substrate is strong enough for depositing 11 m thick hohlraum wall containing depleted uranium (DU).
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