激光聚变X射线诊断用高精度多层膜器件与系统技术

High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion

  • 摘要: 高精度多层膜器件是开展多维度、高分辨激光惯性约束聚变(ICF)X射线诊断的核心元件。针对激光聚变热斑高质量观测需求,开展了X射线多层膜诊断成像器件的研究,包括Kirkpatrick-Baez(KB)反射镜、离轴非球面反射镜和Wolter型显微元件。提出了基于多通道KB反射镜的高分辨自发光与背发光诊断数据同步测量方法,经测试系统空间分辨率优于5 μm。发展了高精度拼接检测和离子束加工一体化的非球面反射镜制造工艺,经过离子束修正后50 mm反射镜面型残差达1.56 nm(RMS),粗糙度优于0.3 nm。建立了Wolter型显微元件设计、检测、抛光和多层膜镀制的全流程制作方法。上述器件与系统技术的研究为我国ICF实验等离子体诊断提供了有力的支撑。

     

    Abstract:
    Backgrounds Multilayer film optics allow for the accurate characterization of high-energy-density plasmas produced in ICF implosions by capturing critical information—temporal, spatial, and spectral—of X-rays, thereby enabling dynamic monitoring of the target. Such comprehensive diagnostics are essential for validating numerical models and understanding the key physics that ultimately determine implosion performance.
    Purpose To address critical X-ray diagnostic applications in ICF research, this paper presents the design, fabrication, characterization, and implementation of high-performance multilayer film optics and systems capable of achieving imaging resolution better than 5 μm, including three critical components: Kirkpatrick-Baez (KB) mirrors, off-axis aspheric mirrors, and Wolter microscopes.
    Methods Key advancements were achieved in X-ray optics, ranging from multi-channel KB mirrors for dual-mode diagnostics, precision-manufactured off-axis aspheres, and comprehensively engineered Wolter microscopes.
    Results Key achievements include a spatial resolution of sub-5 μm using the multi-channel KB mirror system, an exceptional surface figure of 1.56 nm RMS and roughness <0.3 nm on a 50 mm length off-axis asphere via ion beam figuring, and the successful implementation of a full-process methodology for Wolter microscopes.
    Conclusions Breakthroughs in the high-precision manufacturing of multilayer film optics and systems will provide robust technical support for plasma diagnostics in domestic ICF experiments.

     

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