异面结构雪崩GaAs光导开关的制备及特性测试

Fabrication of avalanche GaAs photoconductive switch with opposed-electrode structure and its switching characteristics

  • 摘要: 雪崩砷化镓光导开关(PCSS)因其超快开关速度、低触发抖动、光电隔离、高功率容量、高重复频率以及器件结构灵活的特点,得到广泛应用。制备封装了电极间隙为5 mm的异面结构GaAs光导开关,对不同偏置电场下(36~76 kV/cm)开关的暗态和开态的电学特性进行了测试分析,结果表明其具有百皮秒~纳秒量级的上升沿、低暗态泄漏电流(0.15~6.61 μA)、高耐压(18~38 kV)的特点。实验探究了开关工作次数与输出电压峰值的关系,结果表明随着工作次数的增大,输出电压幅值呈台阶型降低趋势,在20 kV、2 Hz条件下,开关寿命达4.0×104次。

     

    Abstract: Avalanche gallium arsenide photoconductive semiconductor switches (GaAs PCSSs ) have a wide range of applications due to their ultra-fast switching speed, low triggering jitter , optoelectronic isolation , high power capacity, high repetition frequency, and flexible device structure. In this paper, GaAs PCSSs with an anisotropic structure and an electrode gap of 5 mm are fabricated and packaged. The electrical characteristics of the switch in dark-state and on-states under different bias electric fields (36−76 kV/cm) are analyzed, featuring a rising edge in the order of hundred picosecond to nanosecond, low dark-state leakage current (0.15−6.61 μA) and high withstand voltage (18−38 kV). The relationship between the number of switching operations and the peak output voltage is explored. The experimental results show that the output voltage amplitude tends to decrease in a stepwise manner with the increase of the number of operations. The switch lifetime reaches 4.0 × 104 times at 20 kV and 2 Hz.

     

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